Sch"after+Kirchhoff SK1024U3PD Bedienungsanleitung PDF herunterladen (Seite 17)

Interface

No.

Line scan camera

Order code Order code

Pixels

Line

frequency,

max.

Video

signal

Pixel

size

Active

length

Anti-

Bloom

Integr.

Ctrl.

Sha-

ding

corr

Thres-

hold

mode

Dynamic

range

(RMS)

Power

supply

Came-

casing

Lens

thread

TDI

SK1024GTDI-L

SK2048GTDI-L

SK1024VTDI-L

SK2048VTDI-L

SK4096GTDI-XL

SK1024U3TDI

SK4096VTDI-XL

96 x 1024

96 x 2048

43.40 kHz

43.50 kHz

96 x 4096

96 x 1024

22.70 kHz

43.40 kHz

SK2048U3TDI

SK1024CTDI

SK2048CTDI

SK4096CTDI-XL

96 x 2048

96 x 1024

43.40 kHz

96 x 2048

96 x 4096

43.40 kHz

22.30 kHz

TDI

11 TDI

SK1024ZTDI

SK2048ZTDI

SK4096ZTDI-XL

96 x 1024

96 x 2048

43.40 kHz

26.80 kHz

96 x 4096 14.00 kHz

8/12 Bit

13 x 13 μm

8/12 Bit

13 x 13 μm

13.30 mm

26.60 mm

53.20 mm

13.30 mm

8/12 Bit

13 x 13 μm

2*8 Bit

13 x 13 μm

26.60 mm

13.30 mm

26.60 mm

53.20 mm

1:2500

8/12 Bit

8 Bit

13 x 13 μm

8 Bit 13 x 13 μm

13.30 mm

26.60 mm

53.20 mm x

1:5000

- 1:5000

+5V, +15V

BG3

+5V, +15V

CG5

AT2

M45x0.75

M72x0.75

M40x0.75

+5V, +15V

AT2

AC2

+5V, +15V

AC2

CC5

M40x0.75

M72x0.75

V, +15V, -1

AL2

5V, +15V,-15

CL5

M40x0.75

M72x0.75

Table 1

TDI_ZK.indd • Page 30

Kieler Str. 212, 22525 Hamburg, Germany • Tel: +49 40 85 39 97-0 • Fax: +49 40 85 39 97-79 • [email protected] • www.SuKHamburg.com

11-2014 E

Highlights of Time Delay Integration (TDI) Technology:

• Sensitivity 96-times greater than conventional line scan cameras

• Especially useful for dimly lit objects (e.g. wafer inspection with dark-field illumination)

• TDI cameras can achieve extremely high measurement and scan velocities

LVDS

TDI Line Scan Cameras

Time Delay Integration Technology

The principle of TDI technology is based on the

time-shifted multiple exposure of a moving object.

The sensor is composed of 96 line sensors arranged

in parallel. At the end of one period of exposure, the

accumulated charges in that line sensor are shifted

to the next line (see figure, right). During the next

exposure pe riod, new charges are acquired, added

to the already existing charges and the new sum is

again shifted to the next line. Finally, after 96 expo-

sures, the sum of all lines is output as a video signal.

Synchronous transport of a scanned object across

the field of the camera actually produces a 96-fold

multiple exposure. For each exposure period, the

object has moved far enough that the next sensor line

is not only ready for exposure but has also already

been filled with the accumulated charges from the

previous sensor line(s).

Principle of TDI Technology

charge transfer

TDI sensor

Lens

intensity

Multiple exposure

of a moving object

Object

VOLTAIC

ANALYSIS

WAFER

400

100

600 800

Wavelength (nm)

Relative Sensitivity (%)

1000

Camera Pixels

Maximum

pixel

frequency

Maximum

line

frequency

Active

sensor

length

SK1024GTDI

1024 x 96 50 MHz 43.4 kHz 13.3 mm

SK2048GTDI

2048 x 96 100 MHz 43.5 kHz 26.6 mm

SK2048U3TDI

2048 x 96 100 MHz 43.4 kHz 26.6 mm

SK4096CTDI-XL

4096 x 96 100 MHz 22.3 kHz 53.2 mm

Monochrome TDI line scan cameras from Schäfter+Kirchhoff

SK4096GTDI-XL

Focus adapter FA26-S45

Macro lens

Apo-Rodagon

D1x 4.0/75

for 1:1 imaging

SK2048U3TDI

Focus adapter FA22-40

Scanning lens

Apo-Rodagon N 4.0/80

Mounting

bracket SK5105

Accessories: Page

Lenses and lens adapters . . . . . . . . . . . . . . . . . . 39–43

Extension rings . . . . . . . . . . . . . . . . . . . . . . . . . . 39–43

Camera mounting brackets . . . . . . . . . . . . . . . . . . . . 43

Connection cables, external power supplies . . . . . . 38

See Table 1,

line 3

See Table 1,

lines 1–2

Interface

See Table 1,

line 11

See Table 1,

line 8

See Table 1,

lines 4-5

See Table 1,

lines 9-10

See Table 1,

lines 6-7

Interface

Spectral Sensitivity

Line Scan Cameras

1024 x 96, 2048 x 96, 4096 x 96 pixels

Interface

LVDS

TDI camera applications

DOCUMENTS

Just 4 applications from 1000s

TDI cameras are especially useful

for dimly lit objects

VISION

Interface

1 2 ... 12 13 14 15 16 17 18 19 20 21 22 23 24

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